Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH

Physics & Astronomy

• aqueous solutions 59%
• borosilicate glass 73%
• etchants 39%
• etching 48%
• fabrication 19%
• glass 37%
• lasers 28%
• microchannels 33%
• micrometers 29%
• potassium hydroxides 47%
• selectivity 30%
• spatial resolution 25%

Engineering & Materials Science

• Borosilicate glass 46%
• Etching 69%
• Fabrication 23%
• Femtosecond lasers 100%
• Glass 51%
• Microchannels 35%
• Potassium hydroxide 48%

Chemical Compounds

• Aqueous Solution 33%
• Borosilicate Glass 40%
• Etching 57%
• Glass 44%
• Potassium Hydroxide 35%