@inproceedings{e6d49a92d8be451f81b7c39ac32c5763,
title = "Femtosecond laser-induced surface patterning on 4H-SiC",
abstract = "Femtosecond laser-induced periodic structures, so-called {"}ripples{"}, were systematically studied under various incident laser wavelengths and polarization properties. The effect of the excitation wavelength on the period of ripples was investigated from the infrared to ultraviolet laser pulses. The period of ripple on 4H-SiC correlated remarkably with the wavelength of the incident laser beam. This means that the period of ripples can be controlled by the wavelength of the laser beam. The irradiation of circular polarized femtosecond laser beam produced dot-like structures with the mean spacing of about 200 nm on the surface of 4H-SiC. The effect of initial surface roughness was also studied.",
keywords = "Femtosecond laser, Micro-machining, Periodic structure, Ripple, Surface pattering",
author = "Takuro Tomita and Ryota Kumai and Keita Kinoshita and Shigeki Matsuo and Shuichi Hashimto and Hirokazu Nagase and Makoto Nakajima and Tohru Suemoto",
year = "2009",
month = jan,
day = "1",
language = "English",
isbn = "9780878493579",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "879--882",
editor = "Takashi Fuyuki and Hajime Okumura and Kenji Fukuda and Shin-ichi Nishizawa and Tsunenobu Kimoto and Akira Suzuki",
booktitle = "Silicon Carbide and Related Materials 2007",
note = "12th International Conference on Silicon Carbide and Related Materials, ICSCRM 2007 ; Conference date: 14-10-2007 Through 19-10-2007",
}