Fluid Drive Chips Containing Multiple Pumps and Switching Valves for Biochemical IC Family - Development of SMA 3D micro pumps and valves in leak-free polymer package -

K.Ikuta K.Ikuta; T.Hasegawa T.Hasegawa; T.Adachi T.Adachi; S.Maruo S.Maruo; Tadahiro Hasegawa

Fluid Drive Chips Containing Multiple Pumps and Switching Valves for Biochemical IC Family - Development of SMA 3D micro pumps and valves in leak-free polymer package -

K.Ikuta K.Ikuta, T.Hasegawa T.Hasegawa, T.Adachi T.Adachi, S.Maruo S.Maruo, Tadahiro Hasegawa

機能制御システム専攻

研究成果: Article › 査読

本文言語	English
ページ（範囲）	739-744
ジャーナル	Thirteenth IEEE International Micro Electro Mechanical Systems Conference
出版ステータス	Published - 2000 1月 1

引用スタイル

Fluid Drive Chips Containing Multiple Pumps and Switching Valves for Biochemical IC Family - Development of SMA 3D micro pumps and valves in leak-free polymer package -. / K.Ikuta, K.Ikuta; T.Hasegawa, T.Hasegawa; T.Adachi, T.Adachi その他.
In: Thirteenth IEEE International Micro Electro Mechanical Systems Conference, 01.01.2000, p. 739-744.

研究成果: Article › 査読

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AU - T.Hasegawa, T.Hasegawa

AU - T.Adachi, T.Adachi

AU - S.Maruo, S.Maruo

AU - Hasegawa, Tadahiro

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JO - Thirteenth IEEE International Micro Electro Mechanical Systems Conference

JF - Thirteenth IEEE International Micro Electro Mechanical Systems Conference

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