@inproceedings{aa417a68c05542ac95e3453721b971d1,
title = "Formation of nanovoids in femtosecond laser-irradiated single crystals of silicon carbide",
abstract = "Scanning transmission electron microscopy was carried out to study the three-dimensional microstructures of periodic strained layers induced by the irradiation of femtosecond laser pulses inside a silicon carbide single crystal. The cross section of laser-irradiated line consisted of a shell-shaped modified region surrounding a core region with no modification. The laser-modified region was composed of strained layers with a typical spacing of 200 nm. Nanovoids from 10 nm to 20 nm in diameter were observed. Three-dimensional tomographic images clearly show the plate-like shape of strained layers extending parallel to the electric field of the laser light and the random distribution of nanovoids in the strained layers. The three-dimensional observation provides insight into the formation mechanisms of periodic microstructures.",
keywords = "Femtosecond laser, Nanovoid, Silicon carbide",
author = "Tatsuya Okada and Takuro Tomita and Shigeki Matsuo and Shuichi Hashimoto and Ryota Kashino and Takuto Ito",
year = "2012",
month = dec,
day = "1",
doi = "10.4028/www.scientific.net/MSF.725.19",
language = "English",
isbn = "9783037854426",
series = "Materials Science Forum",
pages = "19--22",
booktitle = "Defects-Recognition, Imaging and Physics in Semiconductors XIV",
note = "14th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors, DRIP-14 ; Conference date: 25-09-2011 Through 29-09-2011",
}