T. Homma, T. Homma;T.Katoh;Y.Yamada;J.Shimizu;Y. Murao
研究成果: Article › 査読
}
TY - JOUR
T1 - Fully Planarized Multilevel Interconnection Using Selective SiO２ Deposition
AU - Homma, T.
AU - Murao, T. Homma;T.Katoh;Y.Yamada;J.Shimizu;Y.
PY - 1991/7/1
Y1 - 1991/7/1
M3 - Article
VL - 32
SP - 315
EP - 322
JO - NEC Research & Development
JF - NEC Research & Development
ER -