抄録
A new gas sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36 YX LiTaO 3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in gas phase.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 113-118 |
| ページ数 | 6 |
| ジャーナル | Ferroelectrics |
| 巻 | 273 |
| DOI | |
| 出版ステータス | Published - 2002 1月 1 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 凝縮系物理学