Grain growth enhancement of electroplated copper film by supercritical annealing

Kazuyoshi Ueno, Yuji Shimada, Shigeru Yomogida, Seishi Akahori, Tomohiko Yamamoto, Takamasa Yamaguchi, Yoshinori Aoki, Akiko Matsuyama, Takashi Yata, Hideki Hashimoto