Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors

K. Kita, Y. Osaka, K. Kyuno, S. Takagi, K. Takasaki, M. Kubota, Y. Shimamoto, A. Toriumi

研究成果: Article › 査読

本文言語	English
ページ（範囲）	206-214
ジャーナル	Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2)
出版ステータス	Published - 2002 9月 1

引用スタイル

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title = "Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors",

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AU - Kita, K.

AU - Osaka, Y.

AU - Kyuno, K.

AU - Takagi, S.

AU - Takasaki, K.

AU - Kubota, M.

AU - Shimamoto, Y.

AU - Toriumi, A.

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EP - 214

JO - Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2)

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