@inproceedings{ce62a6cce5694ed9aa16d9c18e0f9a73,
title = "High precision control for nano-stage driven by magnetostrictive actuator",
abstract = "The nano-stage driven by magnetostrictive actuator is composed of a magnetostrictive actuator and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the magnetostrictive actuator and the friction behavior in the PM, the accurate position control of the nano-stage is a challenging task. This paper discusses the high precision control for the magnetostrictive nano-stage, where the hysteresis is described by Preisach model. The proposed control law ensures the zero output tracking of the controlled stage. Experimental results show the effectiveness of the proposed method.",
keywords = "Nano-stage, Preisach model, hysteresis, magnetostrictive actuator",
author = "Xinkai Chen and Su, {Chun Yi}",
note = "Copyright: Copyright 2021 Elsevier B.V., All rights reserved.; 6th International Conference on Intelligent Robotics and Applications, ICIRA 2013 ; Conference date: 25-09-2013 Through 28-09-2013",
year = "2013",
doi = "10.1007/978-3-642-40849-6_66",
language = "English",
isbn = "9783642408489",
series = "Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)",
publisher = "Springer Verlag",
number = "PART 2",
pages = "666--677",
booktitle = "Intelligent Robotics and Applications - 6th International Conference, ICIRA 2013, Proceedings",
edition = "PART 2",
}