TY - GEN
T1 - High precision control for piezo-actuated positioners
AU - Chen, Xinkai
PY - 2009
Y1 - 2009
N2 - The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive sliding mode control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. This paper tries to fuse the hysteresis model with the adaptive control techniques, where the real value of the parameters of the stage need neither to be identified nor to be measured. The proposed control law ensures the global stability of the controlled nano-positioner, and the position error can be controlled to be as small as required by choosing the design parameters. Experimental results show the effectiveness of the proposed method.
AB - The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive sliding mode control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. This paper tries to fuse the hysteresis model with the adaptive control techniques, where the real value of the parameters of the stage need neither to be identified nor to be measured. The proposed control law ensures the global stability of the controlled nano-positioner, and the position error can be controlled to be as small as required by choosing the design parameters. Experimental results show the effectiveness of the proposed method.
KW - Hysteresis
KW - Piezo electric actuator
KW - Positioner
KW - Prandtl-Ishlinskii model
UR - http://www.scopus.com/inward/record.url?scp=77449154805&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77449154805&partnerID=8YFLogxK
U2 - 10.1109/ICMA.2009.5245966
DO - 10.1109/ICMA.2009.5245966
M3 - Conference contribution
AN - SCOPUS:77449154805
SN - 9781424426935
T3 - 2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009
SP - 966
EP - 971
BT - 2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009
T2 - 2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009
Y2 - 9 August 2009 through 12 August 2009
ER -