Hydrogen sulfide sensing characteristics of tin oxide sol-derived thin films

Masami Ando, Seiichi Suto, Takahiro Suzuki, Takashi Tsuchida, Chiaki Nakayama, Norio Miura, Noboru Yamazoe

研究成果: Article査読

17 被引用数 (Scopus)


Porous thin films of SnO2 were prepared on an alumina substrate using hydrothermally synthesized SnO2 sol, to investigate the influences of film-preparation conditions on the microstructure and H2S sensing characteristics of the thin films obtained. The sensitivity and response transient to 5 ppm H2S in air depended significantly on calcination temperature, operating temperature and film thickness. The 0.6 μm-thick SnO2 film calcined at an optimum temperature of 700°C exhibited gas sensitivity (the ratio of electrical resistance in air to that in gas) as high as 550 together with good response transient characteristics to 5 ppm H2S in air at 200°C. The crystallite size of SnO2 as well as the pore size increased uniformly with a rise in calcination temperature, growing to 17.4 nm and 21 nm, at 700°C, respectively. The formation of well-defined large mesopores appears to be responsible for the excellent H2S sensing characteristics.

ジャーナルJournal of the Ceramic Society of Japan
出版ステータスPublished - 1996

ASJC Scopus subject areas

  • セラミックおよび複合材料
  • 化学 (全般)
  • 凝縮系物理学
  • 材料化学


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