Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting

Qi Wang; Hiroyuki Oguchi; Motoaki Hara; Hiroki Kuwano

doi:10.1109/MEMSYS.2014.6765721

Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting

Qi Wang, Hiroyuki Oguchi, Motoaki Hara, Hiroki Kuwano

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

We investigated the experimental conditions affecting degree of c-axis tilt angle, which is related to output power of piezoelectric energy harvesters, of the oriented aluminum nitride (AlN) thin films grown using electron cyclotron resonance (ECR) sputtering. The c-axis tilt angle of the AlN thin films deposited on silicon (100) substrates was measured by X-ray diffractometry with a 2-dimenaioanl detector (2D XRD). This study verified that 1) lowering the incident angle of the flux during thin film growth and 2) lower substrate temperature, and 3) increasing the buffer layer roughness are effective ways to increase the c-axis tilt angle of the AlN thin films.

本文言語	English
ホスト出版物のタイトル	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	636-639
ページ数	4
ISBN（印刷版）	9781479935086
DOI	https://doi.org/10.1109/MEMSYS.2014.6765721
出版ステータス	Published - 2014
外部発表	はい
イベント	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States 継続期間: 2014 1月 26 → 2014 1月 30

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN（印刷版）	1084-6999

Conference

Conference	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
国/地域	United States
City	San Francisco, CA
Period	14/1/26 → 14/1/30

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

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10.1109/MEMSYS.2014.6765721

他のファイルとリンク

引用スタイル

Wang, Q., Oguchi, H., Hara, M., & Kuwano, H. (2014). Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 636-639). Article 6765721 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765721

Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting. / Wang, Qi; Oguchi, Hiroyuki; Hara, Motoaki その他.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 636-639 6765721 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

研究成果: Conference contribution

Wang, Q, Oguchi, H, Hara, M & Kuwano, H 2014, Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765721, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 636-639, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765721

Wang Q, Oguchi H, Hara M, Kuwano H. Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 636-639. 6765721. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765721

Wang, Qi ; Oguchi, Hiroyuki ; Hara, Motoaki その他. / Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 636-639 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "We investigated the experimental conditions affecting degree of c-axis tilt angle, which is related to output power of piezoelectric energy harvesters, of the oriented aluminum nitride (AlN) thin films grown using electron cyclotron resonance (ECR) sputtering. The c-axis tilt angle of the AlN thin films deposited on silicon (100) substrates was measured by X-ray diffractometry with a 2-dimenaioanl detector (2D XRD). This study verified that 1) lowering the incident angle of the flux during thin film growth and 2) lower substrate temperature, and 3) increasing the buffer layer roughness are effective ways to increase the c-axis tilt angle of the AlN thin films.",

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Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting

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Conference

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