TY - GEN
T1 - Laser micro fabrication of photoresist rod array using a microlens array
AU - Matsuo, Shigeki
AU - Miyamoto, Takashi
AU - Tomita, Takuro
PY - 2005/12/1
Y1 - 2005/12/1
N2 - Simultaneous fabrication of periodically arranged rods of photoresist with an aspect ratio of about 15 was carried out by femtosecond laser processing using a microlens array.
AB - Simultaneous fabrication of periodically arranged rods of photoresist with an aspect ratio of about 15 was carried out by femtosecond laser processing using a microlens array.
UR - http://www.scopus.com/inward/record.url?scp=33847143281&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33847143281&partnerID=8YFLogxK
U2 - 10.1109/CLEOPR.2005.1569869
DO - 10.1109/CLEOPR.2005.1569869
M3 - Conference contribution
AN - SCOPUS:33847143281
SN - 0780392426
SN - 9780780392427
T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
SP - 1731
EP - 1732
BT - Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
T2 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
Y2 - 11 July 2005 through 15 July 2005
ER -