Liquid Sensor System Using Reflecting Surface Acoustic Wave Delay Lines

Tooru Nomura; Atsushi Saitoh

Liquid Sensor System Using Reflecting Surface Acoustic Wave Delay Lines

研究成果: Paper › 査読

抄録

A new sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36° YX LiTaO₃ and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a response of the sensor probe. Several experiments were performed to verify the edge reflection type SAW sensor in viscous and ionic liquids. Experimental results showed that the sensor is very suitable for sensing of liquid phase.

本文言語	English
ページ	507-510
ページ数	4
出版ステータス	Published - 2002 12月 1
イベント	First IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States 継続期間: 2002 6月 12 → 2002 6月 14

Conference

Conference	First IEEE International Conference on Sensors - IEEE Sensors 2002
国/地域	United States
City	Orlando, FL
Period	02/6/12 → 02/6/14

ASJC Scopus subject areas

電子工学および電気工学

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abstract = "A new sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36° YX LiTaO3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a response of the sensor probe. Several experiments were performed to verify the edge reflection type SAW sensor in viscous and ionic liquids. Experimental results showed that the sensor is very suitable for sensing of liquid phase.",

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author = "Tooru Nomura and Atsushi Saitoh",

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AU - Nomura, Tooru

AU - Saitoh, Atsushi

PY - 2002/12/1

Y1 - 2002/12/1

N2 - A new sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36° YX LiTaO3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a response of the sensor probe. Several experiments were performed to verify the edge reflection type SAW sensor in viscous and ionic liquids. Experimental results showed that the sensor is very suitable for sensing of liquid phase.

AB - A new sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36° YX LiTaO3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a response of the sensor probe. Several experiments were performed to verify the edge reflection type SAW sensor in viscous and ionic liquids. Experimental results showed that the sensor is very suitable for sensing of liquid phase.

KW - Liquid sensor

KW - Reflecting SH-SAW delay line

KW - SAW sensor

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SP - 507

EP - 510

T2 - First IEEE International Conference on Sensors - IEEE Sensors 2002

Y2 - 12 June 2002 through 14 June 2002

ER -

Liquid Sensor System Using Reflecting Surface Acoustic Wave Delay Lines

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ASJC Scopus subject areas

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