Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures

H. Nishikawa; Y. Furuta; N. Uchiya; J. Haga; M. Oikawa; T. Satoh; Y. Ishii; T. Kamiya

doi:10.1109/IMNC.2007.4456107

Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures

H. Nishikawa, Y. Furuta, N. Uchiya, J. Haga, M. Oikawa, T. Satoh, Y. Ishii, T. Kamiya

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

We demonstrated fabrication of high-aspect ratio structures by proton beam writing on positive and negative resists. High aspect ratio up to 20 and smallest feature size up to 130 nm were achieved. The depth of machining is controlled so accurately by the beam injection energy. We succeeded in the production of three dimension micro-structures, 'Arch of Triumph', by double drawing on the same resist-sample by two kinds of microbeams with different energies and with different patterns. This shows a unique feature of the PBW as a micromachining tool for multilevel microstructures.

本文言語	English
ホスト出版物のタイトル	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
ページ	66-67
ページ数	2
DOI	https://doi.org/10.1109/IMNC.2007.4456107
出版ステータス	Published - 2007 12月 1
イベント	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan 継続期間: 2007 11月 5 → 2007 11月 8

出版物シリーズ

名前	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conference	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
国/地域	Japan
City	Kyoto
Period	07/11/5 → 07/11/8

ASJC Scopus subject areas

ハードウェアとアーキテクチャ
電子工学および電気工学

文献へのアクセス

10.1109/IMNC.2007.4456107

他のファイルとリンク

引用スタイル

Nishikawa, H., Furuta, Y., Uchiya, N., Haga, J., Oikawa, M., Satoh, T., Ishii, Y., & Kamiya, T. (2007). Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 66-67). [4456107] (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456107

Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures. / Nishikawa, H.; Furuta, Y.; Uchiya, N. その他.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 66-67 4456107 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

研究成果: Conference contribution

Nishikawa, H, Furuta, Y, Uchiya, N, Haga, J, Oikawa, M, Satoh, T, Ishii, Y & Kamiya, T 2007, Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456107, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 66-67, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 07/11/5. https://doi.org/10.1109/IMNC.2007.4456107

Nishikawa H, Furuta Y, Uchiya N, Haga J, Oikawa M, Satoh T その他. Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 66-67. 4456107. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). doi: 10.1109/IMNC.2007.4456107

Nishikawa, H. ; Furuta, Y. ; Uchiya, N. その他. / Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 66-67 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

@inproceedings{351f19396b294f5ca8c55d26afd14805,

title = "Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures",

abstract = "We demonstrated fabrication of high-aspect ratio structures by proton beam writing on positive and negative resists. High aspect ratio up to 20 and smallest feature size up to 130 nm were achieved. The depth of machining is controlled so accurately by the beam injection energy. We succeeded in the production of three dimension micro-structures, 'Arch of Triumph', by double drawing on the same resist-sample by two kinds of microbeams with different energies and with different patterns. This shows a unique feature of the PBW as a micromachining tool for multilevel microstructures.",

author = "H. Nishikawa and Y. Furuta and N. Uchiya and J. Haga and M. Oikawa and T. Satoh and Y. Ishii and T. Kamiya",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/IMNC.2007.4456107",

language = "English",

isbn = "4990247248",

series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

pages = "66--67",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",

}

TY - GEN

T1 - Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures

AU - Nishikawa, H.

AU - Furuta, Y.

AU - Uchiya, N.

AU - Haga, J.

AU - Oikawa, M.

AU - Satoh, T.

AU - Ishii, Y.

AU - Kamiya, T.

PY - 2007/12/1

Y1 - 2007/12/1

N2 - We demonstrated fabrication of high-aspect ratio structures by proton beam writing on positive and negative resists. High aspect ratio up to 20 and smallest feature size up to 130 nm were achieved. The depth of machining is controlled so accurately by the beam injection energy. We succeeded in the production of three dimension micro-structures, 'Arch of Triumph', by double drawing on the same resist-sample by two kinds of microbeams with different energies and with different patterns. This shows a unique feature of the PBW as a micromachining tool for multilevel microstructures.

AB - We demonstrated fabrication of high-aspect ratio structures by proton beam writing on positive and negative resists. High aspect ratio up to 20 and smallest feature size up to 130 nm were achieved. The depth of machining is controlled so accurately by the beam injection energy. We succeeded in the production of three dimension micro-structures, 'Arch of Triumph', by double drawing on the same resist-sample by two kinds of microbeams with different energies and with different patterns. This shows a unique feature of the PBW as a micromachining tool for multilevel microstructures.

UR - http://www.scopus.com/inward/record.url?scp=47349092552&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=47349092552&partnerID=8YFLogxK

U2 - 10.1109/IMNC.2007.4456107

DO - 10.1109/IMNC.2007.4456107

M3 - Conference contribution

AN - SCOPUS:47349092552

SN - 4990247248

SN - 9784990247249

T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

SP - 66

EP - 67

BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

Y2 - 5 November 2007 through 8 November 2007

ER -

Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures

抄録

出版物シリーズ

Conference

ASJC Scopus subject areas

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