An organic monolayer directly attached to silicon was prepared through a reaction between 1,7-octadien (OD) and hydrogen-terminated silicon. The OD-monolayer had H2C-terminated groups. The properties of OD-monolayer were evaluated by atomic force microscopy (AFM), ellipsometry and water contact angle measurements. The H2C-terminated groups were site-selectively oxidized through scanning probe anodization and ultraviolet (VUV) irradiation. The sample surfaces fabricated were evaluated by Kelvin force probe microscopy (KPFM) and X-ray photoelectron spectroscopy (XPS). Chemical conversion of functional group in the OD-monolayer was evaluated based on the surface potential change and the immobilization of fluorescence-labeled spheres onto the sample surfaces.
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