Maskless micropatterning of electrochromic nanoparticles using a focused electron beam

Yuki Katori, Yusuke Suzaka, Masayuki Shimojo

研究成果: Article査読

2 被引用数 (Scopus)


Optical properties of electrochromic (EC) materials can be reversibly changed under applied voltages through electrochemical redox reactions. Prussian blue (PB) is a well-known EC material that changes color from blue to colorless and transparent, and vice versa. Fine patterning of PB particles on a transparent substrate could lead to the development of a high-quality display device with very low energy consumption. In this paper, a maskless patterning technique using a focused electron beam is described, and the effects of the accelerating voltage and the electron dose are studied. The results show that the micropatterning of PB particles is achieved at an accelerating voltage of 5 kV and at electron doses of 10-100 C/m2. Reversible changes in color were observed between blue and colorless-transparent after the patterning of PB particles.

ジャーナルJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
出版ステータスPublished - 2019 5月 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • プロセス化学およびプロセス工学
  • 表面、皮膜および薄膜
  • 電子工学および電気工学
  • 材料化学


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