抄録
The SH-SAW resonator having narrow bandwidth and higher Q value has been used for sensing the properties in ionic and viscosity of liquid. The surface acoustic waves with the shear horizontal displacement (SH-SAW) are excited on a piezoelectric substrate; 36 rotated Y cut X prop. LiTaO3 (36 YX LiTaO3) and the liquid flow sensing system was constructed by using two-port resonator on the substrate. The flow of a sample liquid was interacted with the SAW only on the cavity of the resonator. The resonator was connected in an amplifier, to construct an SH-SAW oscillator. The frequency changes of the SH-SAW oscillator were detected as a sensor response. Experimental results showed that the response of the SAW sensor varied with both the conductivity and the square root of product of the density and viscosity of the liquid. Transit responses of the SAW sensor system to the flow of the sample liquid also showed a specific feature. It was found that these quantities were very useful to determine the properties of liquid.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 69-73 |
| ページ数 | 5 |
| ジャーナル | Sensors and Actuators, B: Chemical |
| 巻 | 76 |
| 号 | 1-3 |
| DOI | |
| 出版ステータス | Published - 2001 6月 1 |
| イベント | Proceeding of the 8th International Meeting on Chemical Sensors - Basel, Switzerland 継続期間: 2000 7月 2 → 2000 7月 5 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 器械工学
- 凝縮系物理学
- 表面、皮膜および薄膜
- 金属および合金
- 電子工学および電気工学
- 材料化学