TY - JOUR
T1 - Measurement of acoustic properties of liquid using SH- and R-mode surface acoustic wave
AU - Nomura, Tooru
AU - Uchiyama, Masayuki
AU - Saitoh, Atsushi
AU - Furukawa, Shoji
PY - 1998/12/1
Y1 - 1998/12/1
N2 - A new liquid sensor using multi-mode surface acoustic wave (SAW) delay lines is described. SAW having shear horizontal (SH) displacement and Rayleigh (R) mode SAW have been used for measuring the acoustic properties of liquid. A special feature of the sensor is that the SH-SAW and R-SAW delay line are constructed in one substrate. A each mode SAW delay line were constructed on one 36° YX LiNbO3 substrate. The SH-SAW was excited on the X direction and the R-SAW was excited on the direction at 90° to X on the substrate. The measurements were performed for water/glycerol solution. The experimental results show that the attenuation of the SH- and R-SAW are proportional to the viscosity and the density of the loaded solution, respectively. These results indicate that the SH-SAW and R-SAW are very suitable for measuring the acoustic properties of liquid.
AB - A new liquid sensor using multi-mode surface acoustic wave (SAW) delay lines is described. SAW having shear horizontal (SH) displacement and Rayleigh (R) mode SAW have been used for measuring the acoustic properties of liquid. A special feature of the sensor is that the SH-SAW and R-SAW delay line are constructed in one substrate. A each mode SAW delay line were constructed on one 36° YX LiNbO3 substrate. The SH-SAW was excited on the X direction and the R-SAW was excited on the direction at 90° to X on the substrate. The measurements were performed for water/glycerol solution. The experimental results show that the attenuation of the SH- and R-SAW are proportional to the viscosity and the density of the loaded solution, respectively. These results indicate that the SH-SAW and R-SAW are very suitable for measuring the acoustic properties of liquid.
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M3 - Conference article
AN - SCOPUS:0032306143
SN - 0161-6404
SP - 645
EP - 651
JO - Proceedings of the Annual IEEE International Frequency Control Symposium
JF - Proceedings of the Annual IEEE International Frequency Control Symposium
T2 - Proceedings of the 1998 IEEE International Frequency Control Symposium
Y2 - 27 May 1998 through 29 May 1998
ER -