TY - GEN
T1 - Micro-machined micro ion source for flexible and concurrent process
AU - Tamonoki, S.
AU - Kuwano, H.
AU - Nagasawa, S.
PY - 2008/8/29
Y1 - 2008/8/29
N2 - In this paper a micro-machined micro ion source using B.K. (Barkhausen-Kurz) oscillation discharge to realize a high ion current is developed for flexible and concurrent MEMS processes. An ion beam with several μA from the micro ion source unit having φ1mmx4.37 mm discharge space was successfully generated.
AB - In this paper a micro-machined micro ion source using B.K. (Barkhausen-Kurz) oscillation discharge to realize a high ion current is developed for flexible and concurrent MEMS processes. An ion beam with several μA from the micro ion source unit having φ1mmx4.37 mm discharge space was successfully generated.
UR - http://www.scopus.com/inward/record.url?scp=50149093286&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50149093286&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2008.4443670
DO - 10.1109/MEMSYS.2008.4443670
M3 - Conference contribution
AN - SCOPUS:50149093286
SN - 9781424417933
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 371
EP - 374
BT - MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
T2 - 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Y2 - 13 January 2008 through 17 January 2008
ER -