Micro-Machined Micro Ion Source for MEMS Flexible Process

Shinya Tamonoki, Hiroki Kuwano, Sumito Nagasawa

研究成果: Article › 査読

本文言語	English
ページ（範囲）	627-630
ジャーナル	Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007),
出版ステータス	Published - 2007 4月 1

引用スタイル

@article{2504911b275546559c9702db90a9167b,

title = "Micro-Machined Micro Ion Source for MEMS Flexible Process",

author = "Shinya Tamonoki and Hiroki Kuwano and Sumito Nagasawa",

year = "2007",

month = apr,

day = "1",

language = "English",

pages = "627--630",

journal = "Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007),",

}