Micro-machining of resists on silicon by proton beam writing
Naoyuki Uchiya, Takuya Harada, Masato Murai, Hiroyuki Nishikawa, Junji Haga, Takahiro Sato, Yasuyuki Ishii, Tomihiro Kamiya
研究成果: Article › 査読
44
被引用数
(Scopus)