Micro-structuring of epoxy resists containing nanoparticles by proton beam writing

Ryo Sano, Simon Hayakawa, Hidetaka Hayashi, Yasuyuki Ishii, Hiroyuki Nishikawa

研究成果: Article査読

3 被引用数 (Scopus)


Proton beam writing (PBW) on SU-8 composites with nanoparticles (size: 14–750 nm) of silver, silica, alumina, and carbon with concentration of 5.0 wt% was studied aiming for high-aspect-ratio micro-structuring. Results of SRIM simulation suggest that deep micromachining of more than 100 μm is possible by 3.0 MeV PBW with increase in lateral straggling of less than 5.0%. Sensitivity loss of 150% was observed by introduction of 5.0 wt% nanoparticles to SU-8. There is a correlation between the sensitivity loss and volume concentration of nanoparticles. We fabricated pillar arrays of SU-8/silver nanocomposites with 10 μm in diameter and 80 μm in height by PBW at 3.0 MeV. Cross-sectional observation of the SU-8/silver pillar arrays shows that silver nanoparticles are homogeneously dispersed in SU-8, while aggregation was observed at the side surface.

ジャーナルNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
出版ステータスPublished - 2017 8月 1

ASJC Scopus subject areas

  • 核物理学および高エネルギー物理学
  • 器械工学


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