TY - GEN
T1 - Micro-structuring of PVDF-TrFE by proton beam writing for tactile sensors
AU - Nojiri, Yoshitaka
AU - Hayashi, Hidetaka
AU - Ishii, Yasuyuki
AU - Nishikawa, Hiroyuki
N1 - Publisher Copyright:
© 2020 Institute of Electrical Engineers of Japan. All rights reserved.
PY - 2020/9/13
Y1 - 2020/9/13
N2 - Aiming at micro-structuring of Polyvinylidene fluoride trifluoroethylene (PVDF-TrFE) film for sensing applications, we studied effects of proton beam irradiation and subsequent alkaline etching processes using potassium hydroxide (KOH) solution. Dependence of the pattering depth and linewidth on the beam energy, fluence, and etching time was investigated. The depth of pattering is mainly determined by etching time for PBW with beam energy of a few MeV and with fluence of less than 10 µC/mm2. By using a moderate fluence of 3.0 µC/mm2 and etching time of 3 h with beam energy of 1.7 MeV, we obtained 4 x 4 arrays of 40 µm height pillars with aspect ratio of about 5.
AB - Aiming at micro-structuring of Polyvinylidene fluoride trifluoroethylene (PVDF-TrFE) film for sensing applications, we studied effects of proton beam irradiation and subsequent alkaline etching processes using potassium hydroxide (KOH) solution. Dependence of the pattering depth and linewidth on the beam energy, fluence, and etching time was investigated. The depth of pattering is mainly determined by etching time for PBW with beam energy of a few MeV and with fluence of less than 10 µC/mm2. By using a moderate fluence of 3.0 µC/mm2 and etching time of 3 h with beam energy of 1.7 MeV, we obtained 4 x 4 arrays of 40 µm height pillars with aspect ratio of about 5.
KW - PBW
KW - PVDF-TrFE
KW - Three-dimensional structures
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M3 - Conference contribution
AN - SCOPUS:85099276708
T3 - Proceedings of the International Symposium on Electrical Insulating Materials
SP - 447
EP - 450
BT - Proceedings of 2020 International Symposium on Electrical Insulating Materials, ISEIM 2020
PB - Institute of Electrical Engineers of Japan
T2 - 2020 International Symposium on Electrical Insulating Materials, ISEIM 2020
Y2 - 13 September 2020 through 17 September 2020
ER -