Micromachining of Polyimide Films by Proton Beam Writing

Y. Takeno; H. Nishikawa; H. Hayashi

Micromachining of Polyimide Films by Proton Beam Writing

Y. Takeno, H. Nishikawa, H. Hayashi

地域環境システム専攻

研究成果: Article › 査読

本文言語	English
ジャーナル	International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, Paper No. (June 2011)
出版ステータス	Published - 2011 6月 1

引用スタイル

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author = "Y. Takeno and H. Nishikawa and H. Hayashi",

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