Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications
Saulius Juodkazis, Kazuhiko Yamasaki, Andrius Marcinkevičius, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa, Thomas Lippert
研究成果: Article › 査読
14
被引用数
(Scopus)