TY - JOUR
T1 - MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene
AU - Miyazaki, Hisao
AU - Matsumoto, Rika
AU - Katagiri, Masayuki
AU - Yoshida, Takashi
AU - Ueno, Kazuyoshi
AU - Sakai, Tadashi
AU - Kajita, Akihiro
N1 - Publisher Copyright:
© 2017 The Japan Society of Applied Physics.
PY - 2017/4
Y1 - 2017/4
N2 - We investigated doping material selection for multilayer graphene (MLG) interconnects and a passivation process to stabilize the doped state. Intercalation doping with Br2, FeCl3, and MoCl5 was compared in terms of doping ability and robustness against environmental effects, which are exacerbated by miniaturization. We found that MoCl5 was advantageous for miniaturization. We hypothesized that environmental stability would be enhanced by partially oxidizing MoCl5 and avoiding hydrolysis by water vapor in air. To test this, we examined a passivation process by dry oxygen exposure. We verified that the doping effect was improved and that intercalated material (MoCl5) was partially oxidized and confined in the MLG.
AB - We investigated doping material selection for multilayer graphene (MLG) interconnects and a passivation process to stabilize the doped state. Intercalation doping with Br2, FeCl3, and MoCl5 was compared in terms of doping ability and robustness against environmental effects, which are exacerbated by miniaturization. We found that MoCl5 was advantageous for miniaturization. We hypothesized that environmental stability would be enhanced by partially oxidizing MoCl5 and avoiding hydrolysis by water vapor in air. To test this, we examined a passivation process by dry oxygen exposure. We verified that the doping effect was improved and that intercalated material (MoCl5) was partially oxidized and confined in the MLG.
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U2 - 10.7567/JJAP.56.04CP02
DO - 10.7567/JJAP.56.04CP02
M3 - Article
AN - SCOPUS:85017126845
SN - 0021-4922
VL - 56
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 4
M1 - 04CP02
ER -