TY - JOUR
T1 - Moisture barrier properties of single-layer graphene deposited on Cu films for Cu metallization
AU - Gomasang, Ploybussara
AU - Abe, Takumi
AU - Kawahara, Kenji
AU - Wasai, Yoko
AU - Nabatova-Gabain, Nataliya
AU - Cuong, Nguyen Thanh
AU - Ago, Hiroki
AU - Okada, Susumu
AU - Ueno, Kazuyoshi
N1 - Funding Information:
This work was supported by CREST, JST Grant Number JPMJCR1532 and JSPS KAKENHI Grant Number JP16H00917.
Publisher Copyright:
© 2018 The Japan Society of Applied Physics.
PY - 2018/4
Y1 - 2018/4
N2 - The moisture barrier properties of large-grain single-layer graphene (SLG) deposited on a Cu(111)/sapphire substrate are demonstrated by comparing with the bare Cu(111) surface under an accelerated degradation test (ADT) at 85°C and 85% relative humidity (RH) for various durations. The change in surface color and the formation of Cu oxide are investigated by optical microscopy (OM) and X-ray photoelectron spectroscopy (XPS), respectively. First-principle simulation is performed to understand the mechanisms underlying the barrier properties of SLG against O diffusion. The correlation between Cu oxide thickness and SLG quality are also analyzed by spectroscopic ellipsometry (SE) measured on a non-uniform SLG film. SLG with large grains shows high performance in preventing the Cu oxidation due to moisture during ADT.
AB - The moisture barrier properties of large-grain single-layer graphene (SLG) deposited on a Cu(111)/sapphire substrate are demonstrated by comparing with the bare Cu(111) surface under an accelerated degradation test (ADT) at 85°C and 85% relative humidity (RH) for various durations. The change in surface color and the formation of Cu oxide are investigated by optical microscopy (OM) and X-ray photoelectron spectroscopy (XPS), respectively. First-principle simulation is performed to understand the mechanisms underlying the barrier properties of SLG against O diffusion. The correlation between Cu oxide thickness and SLG quality are also analyzed by spectroscopic ellipsometry (SE) measured on a non-uniform SLG film. SLG with large grains shows high performance in preventing the Cu oxidation due to moisture during ADT.
UR - http://www.scopus.com/inward/record.url?scp=85044480851&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85044480851&partnerID=8YFLogxK
U2 - 10.7567/JJAP.57.04FC08
DO - 10.7567/JJAP.57.04FC08
M3 - Article
AN - SCOPUS:85044480851
SN - 0021-4922
VL - 57
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 4
M1 - 04FC08
ER -