TY - JOUR
T1 - Multi-channel chemical sensor using surface acoustic wave device
AU - Nomura, T.
AU - Saitoh, A.
AU - Furukawa, S.
PY - 1997/12/1
Y1 - 1997/12/1
N2 - Multi-channel SAW chemical sensor is first used to analytical system for organic gas detection. SAW sensors are easy to show a high frequency property, and can become multi-channel devices on a substrate. The features improve a sensor sensitivity and enables integration of sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of the each channel was used to make a response pattern. The each response to odorant solvents showed the different analyte specific patterns.
AB - Multi-channel SAW chemical sensor is first used to analytical system for organic gas detection. SAW sensors are easy to show a high frequency property, and can become multi-channel devices on a substrate. The features improve a sensor sensitivity and enables integration of sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of the each channel was used to make a response pattern. The each response to odorant solvents showed the different analyte specific patterns.
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M3 - Conference article
AN - SCOPUS:0031384097
SN - 1051-0117
VL - 1
SP - 423
EP - 426
JO - Proceedings of the IEEE Ultrasonics Symposium
JF - Proceedings of the IEEE Ultrasonics Symposium
T2 - Proceedings of the 1997 IEEE Ultrasonics Symposium. Part 1 (of 2)
Y2 - 5 October 1997 through 8 October 1997
ER -