The fabrication of two-dimensional periodic structures by means of multibeam interference of femtosecond pulses was reported. The multiphoton nature of the fabrication process was confirmed. It was found that the fabricated rods arranged into a square lattice have high quality and high aspect ratios.
|ジャーナル||Applied Physics Letters|
|出版ステータス||Published - 2003 4月 28|
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