Nano-graphitization in amorphous carbon films via electron beam irradiation and the iron implantation

Eiji Iwamura, Tatsuhiko Aizawa

研究成果: Conference contribution

1 被引用数 (Scopus)


Nano-graphitization from amorphous carbon state is assisted by the electron beam irradiation. An inter-columnar region in the amorphous carbon films with low atomic and electron densities is controlled to have a graphitic structure by relatively low dose electron beam irradiation. This amorphous carbon - beam interaction generates a new type of carbon hybrids where the graphitic inter-columnar network is embedded into amorphous carbon columns. This hybrid film has an exotic mechanical and tribological response: extraordinary reversible deformability up to 8-10 % in normal strain, high wearing resistance and low friction at high normal pressure. A combination of iron-ion implantation with this electron irradiation provides us the other method of nano-graphitization process. An amorphous carbon film including the implanted iron atoms is chemically modified to have a columnar graphitic structure by the electron beam irradiation. In this post-implantation electron beam irradiation, the basic graphitic units with 1-2 nm in size are controlled to align vertically along the film thickness. This type of nano-graphitization has a strong dependency on the iron doses before electron beam irradiation. The above two types of nano-graphitization provides us a new tool to explore the functionalized structural thin films in application.

ホスト出版物のタイトルSelf Assembly of Nanostructures Aided by Ion- or Photon-Beam Irradiation
ホスト出版物のサブタイトルFundamentals and Applications
出版ステータスPublished - 2007 12月 1
イベント2006 MRS Fall Meeting - Boston, MA, United States
継続期間: 2006 11月 272006 11月 30


名前Materials Research Society Symposium Proceedings


Other2006 MRS Fall Meeting
国/地域United States
CityBoston, MA

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学


「Nano-graphitization in amorphous carbon films via electron beam irradiation and the iron implantation」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。