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Nanoscale imaging by cylindrical microstructure-assisted microscopy

  • Taichi Sano
  • , Keito Tobe
  • , Akihiro Tsuji
  • , Kunpisit Kosumsupamala
  • , Nitipon Puttaraksa
  • , Hironori Seki
  • , Yasuyuki Ishii
  • , Tatsunosuke Matsui
  • , Hiroyuki Nishikawa

研究成果: Article査読

抄録

Conventional optical microscopes have a limit in resolution by a diffraction of light. Here, we propose cylindrical microstructures to assist in resolving nanoscale imaging. The cylindrical microstructures with diameters of 3, 5, 7, and 9 μm were produced by proton beam writing in poly(methyl methacrylate) on nanopatterns of commercial Blu-ray discs. Accordingly, the Blu-ray disc nanopatterns were imaged through cylindrical microstructures using a laser confocal microscope to determine the cylindrical microstructure performances for assisting in nanoimaging. The results showed that the smaller diameter performed better quality of imaging (i.e., contrast and sharp edge) for an objective lens of 20× with a numerical aperture of 0.6. The quality of the imaging was improved with a higher magnification.

本文言語English
論文番号03SP44
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
64
3
DOI
出版ステータスPublished - 2025 3月 1

ASJC Scopus subject areas

  • 工学一般
  • 物理学および天文学一般

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