TY - JOUR
T1 - Nanostructures fabricated by electron beam induced chemical vapor deposition
AU - Takeguchi, M.
AU - Shimojo, M.
AU - Mitsuishi, K.
AU - Tanaka, M.
AU - Furuya, K.
PY - 2004/7/1
Y1 - 2004/7/1
N2 - Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)6 and Fe(CO)5, was attempted to fabricate nanostructures. In case of the deposits from W(CO)6 gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)5 gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)5 gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.
AB - Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)6 and Fe(CO)5, was attempted to fabricate nanostructures. In case of the deposits from W(CO)6 gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)5 gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)5 gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.
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U2 - 10.1016/j.spmi.2004.08.038
DO - 10.1016/j.spmi.2004.08.038
M3 - Conference article
AN - SCOPUS:9644274270
SN - 0749-6036
VL - 36
SP - 255
EP - 264
JO - Superlattices and Microstructures
JF - Superlattices and Microstructures
IS - 1-3
T2 - European Materials Research Society 2004
Y2 - 24 May 2004 through 28 May 2004
ER -