Nitrogen-doped amorphous carbon coating on copper pads for direct wire bonding with a long-term humidity reliability

Engineering & Materials Science

• Amorphous carbon 100%
• Nitrogen 60%
• Atmospheric humidity 58%
• Copper 53%
• Wire 48%
• Coatings 48%
• Amorphous films 17%
• Carbon films 16%
• Oxidation 9%
• Temperature 8%
• Aluminum 8%
• Data storage equipment 6%
• Testing 5%

Physics & Astronomy

• humidity 64%
• wire 48%
• nitrogen 47%
• copper 46%
• coatings 43%
• carbon 43%
• large scale integration 13%
• data storage 12%
• temperature 9%
• oxidation 7%
• aluminum 7%
• optimization 7%