Novel slip-free rapid thermal annealing of GaAs in vacuum with excellent uniformity and reproducibility

Physics & Astronomy

• slip 100%
• wafers 88%
• vacuum 74%
• annealing 70%
• luminaires 55%
• MIS (semiconductors) 21%
• radiation effects 21%
• integrated circuits 18%
• quartz 17%
• convection 16%
• field effect transistors 15%
• causes 11%
• gases 10%
• ions 9%
• performance 8%
• simulation 7%
• temperature 5%