Observation of the creation and annihilation of local current paths in HfO2 thin films on pt by ultrahigh-vacuum conductive atomic force microscopy: Evidence of oxygen spill over during the forming process

Naotaka Sasaki; Koji Kita; Akira Toriumi; Kentaro Kyuno

doi:10.1143/JJAP.48.060202

Observation of the creation and annihilation of local current paths in HfO2 thin films on pt by ultrahigh-vacuum conductive atomic force microscopy: Evidence of oxygen spill over during the forming process

Naotaka Sasaki, Koji Kita, Akira Toriumi, Kentaro Kyuno

研究成果: Article › 査読

9 被引用数 (Scopus)

抄録

By direct observation using ultrahigh-vacuum conductive atomic force microscopy, we find the reversible creation and annihilation of individual local current paths in HfO₂ thin films on Pt. Experimental evidence of oxygen ion diffusion due to an electric field is obtained.

本文言語	English
論文番号	060202
ジャーナル	Japanese Journal of Applied Physics
巻	48
号	6
DOI	https://doi.org/10.1143/JJAP.48.060202
出版ステータス	Published - 2009 6月

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

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10.1143/JJAP.48.060202

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引用スタイル

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abstract = "By direct observation using ultrahigh-vacuum conductive atomic force microscopy, we find the reversible creation and annihilation of individual local current paths in HfO2 thin films on Pt. Experimental evidence of oxygen ion diffusion due to an electric field is obtained.",

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AU - Kyuno, Kentaro

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