Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process

N.Sasaki N.Sasaki; K.Kita K.Kita; A.Toriumi A.Toriumi; K.Kyuno K.Kyuno; Kentaro Kyuno

Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process

N.Sasaki N.Sasaki, K.Kita K.Kita, A.Toriumi A.Toriumi, K.Kyuno K.Kyuno, Kentaro Kyuno

機能制御システム専攻

研究成果: Article › 査読

本文言語	English
ジャーナル	Japanese Journal of Applied Physics
巻	48
出版ステータス	Published - 2009 6月 1

引用スタイル

Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process. / N.Sasaki, N.Sasaki; K.Kita, K.Kita; A.Toriumi, A.Toriumi その他.
In: Japanese Journal of Applied Physics, Vol. 48, 01.06.2009.

研究成果: Article › 査読

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author = "N.Sasaki N.Sasaki and K.Kita K.Kita and A.Toriumi A.Toriumi and K.Kyuno K.Kyuno and Kentaro Kyuno",

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AU - N.Sasaki, N.Sasaki

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AU - A.Toriumi, A.Toriumi

AU - K.Kyuno, K.Kyuno

AU - Kyuno, Kentaro

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

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