TY - JOUR
T1 - Optical propagation loss increase of (Gdbi)3fe5o12 films caused by sputter etching
AU - Yokoi, Hideki
AU - Mizumoto, Tetsuya
AU - Naito, Yoshiyuki
PY - 1995/9
Y1 - 1995/9
N2 - Rib waveguides, which are made of magnetic garnet films of composition (GdBi)3Fe5O12 and are fabricated by Ar sputter etching, have large optical propagation loss when Ti is used as the etch mask. The loss increase is alleviated by using a SiO2 mask. X-ray photoelectron spectroscopy analysis reveals that Fe chemical shift due to Ar+ ion bombardment causes increase in the optical absorption loss, and hence the propagation loss.
AB - Rib waveguides, which are made of magnetic garnet films of composition (GdBi)3Fe5O12 and are fabricated by Ar sputter etching, have large optical propagation loss when Ti is used as the etch mask. The loss increase is alleviated by using a SiO2 mask. X-ray photoelectron spectroscopy analysis reveals that Fe chemical shift due to Ar+ ion bombardment causes increase in the optical absorption loss, and hence the propagation loss.
KW - (GdBi)FeO
KW - Optical absorption loss
KW - Rib waveguide
KW - Sputter etching
KW - X-ray photoelectron spectroscopy
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U2 - 10.1143/JJAP.34.4817
DO - 10.1143/JJAP.34.4817
M3 - Comment/debate
AN - SCOPUS:0029371043
SN - 0021-4922
VL - 34
SP - 4817
EP - 4818
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 9R
ER -