Optical properties of metal and semiconductor SmS thin films fabricated by rf/dc dual magnetron sputtering

S. Tanemura, L. Miao, S. Koide, Y. Mori, P. Jin, A. Terai, N. Nabatova-Gabain

研究成果: Conference article査読

1 被引用数 (Scopus)


Optical properties of both metal and semiconductor phases of SmS thin films on Si substrate grown at a room temperature by dual targets (dc for metal Sm and rf for pressed powdered chalcogenide Sm 2 S 3 ) magnetron sputtering system with the concurrent adjustment of the applied power to respective target, were evaluated by SE at the photon energy range between 0.75 to 5.0eV. This is the first work performed on the intrinsically prepared metallic sample while the former works done for the sample transformed from semiconductor to metal phase by hard polishing. The followings are concluded: (1) in the metallic film, the refractive indices n have maximum value of 2.20 at 4.10eV, while extinction coefficient k decreases monotonically and reaches 0.03 at 5.0eV. The absorption coefficient derived from the obtained k and the complex dielectric constant from n and k agree satisfactorily with those cited in the preceding literatures for the bulk samples; (2) in the case of semiconductor, the refractive indices n have the maximum 3.66 at 3.93eV, while extinction coefficient k increase monotonically from 0 at 2.31eV to 1.633 at 5.0eV. The optical transition mode from valence to conduction band is difficult to determine as either indirect allowed or direct forbidden mode because of the insignificant difference between the linear behavior of the curves α 1/2 and that of α 2/3 (α: absorption coefficient) as a function of photon energy beyond 3.5eV. Hence the optical band gap E g followed by indirect allowed mode and direct forbidden mode is given as 2.67 and 2.78eV, respectively. The agreement between the derived dielectric constant and those in the preceding literatures for bulk semiconductors is not satisfactory.

ジャーナルApplied Surface Science
1-4 SPEC. ISS.
出版ステータスPublished - 2004 11月 15
イベントAPHYS 2003 - Badajoz, Spain
継続期間: 2003 10月 132003 10月 18

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 物理学および天文学(全般)
  • 表面および界面
  • 表面、皮膜および薄膜


「Optical properties of metal and semiconductor SmS thin films fabricated by rf/dc dual magnetron sputtering」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。