PBW (Proton Beam Writer) application for EcoDesign of electronics

Hidetaka Hayashi, Hiroyuki Nishikawa

研究成果: Conference contribution


The subject of this research is to find a process applicable to recycling FPC system adding extra functionality in the polymeric material without photo sensitive agent. We chose PBW (Proton Beam Writer) as an option. The potential impact by charge can modify electronic state and chemical bonding. Acceleration voltage and specific charge limit the depth of material modification. Proton is preferred to save acceleration voltage but the potential impact is low. We have investigated hydrogen molecular ions (H2+ and H3+) to compromise penetration depth and improve potential impact inside the material. These molecular ions are not easy to accelerate but have two or triple fold charges therefore they are especially suited to make big shallow structures. We can efficiently make the GTH (Groove and Thru-hole) structure combining them with Proton for deep structure.

ホスト出版物のタイトル2016 Electronics Goes Green 2016+, EGG 2016
出版社Institute of Electrical and Electronics Engineers Inc.
出版ステータスPublished - 2017 1月 23
イベント2016 Electronics Goes Green 2016+, EGG 2016 - Berlin, Germany
継続期間: 2016 9月 62016 9月 9


Other2016 Electronics Goes Green 2016+, EGG 2016

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 再生可能エネルギー、持続可能性、環境
  • 廃棄物管理と処理
  • 電子材料、光学材料、および磁性材料


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