Preparation of Silica Membranes by CVD Method

研究成果: Chapter

4 被引用数 (Scopus)


Amorphous silica is paid attention as a material for H 2 separation membranes because it shows diffusion selectivity of H 2 . Usually, the silica membrane is formed on a porous ceramic support in order to maintain the mechanical strength of the thin membrane. There are a sol-gel method and a chemical vapor deposition (CVD) method as a typical membrane preparation method. A silica sol is prepared by hydrolyzing a silica source such as a silicon alkoxide for the sol-gel method, and a porous ceramic substrate is coated with the solution to form a membrane. Here, we have paid attention to the CVD methods that the silica source is supplied by a vapor phase. A silica source is vaporized to deposit on a porous ceramic substrate. Silica membranes can be deposited on modules with complicated shape such as a multimembrane module because of the higher diffusivity of the vapor silica sources. The CVD method can be classified into two types, a one side geometry method and a counter-diffusion method.

ホスト出版物のタイトルCurrent Trends and Future Developments on (Bio-) Membranes
ホスト出版物のサブタイトルSilica Membranes: Preparation, Modelling, Application, and Commercialization
出版社Elsevier Inc.
出版ステータスPublished - 2017 8月 12

ASJC Scopus subject areas

  • 工学(全般)
  • 化学工学(全般)


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