TY - GEN
T1 - Proton beam writing micro fabrication system for micro chemical devices
AU - Truong, Phi Nguyen
AU - Teshima, Ryo
AU - Hasegawa, Tadahiro
AU - Nishikawa, Hiroyuki
PY - 2010/12/1
Y1 - 2010/12/1
N2 - The authors have been developing a flexible micro fabrication system using Proton Beam Writing (PBW) for micro chemical devices. The system enable to fabricate the various kind of shape in XY stage, increase the productivity and meet the requirement of fabricate in the centimeter ranger. The flexible system transforms licensed 3D CAD (Computer Aided Design) data to pattern data that is used to control the XY stage of the PBW system. The experimental results showed a brightly future of proton beam in micro fabrication.
AB - The authors have been developing a flexible micro fabrication system using Proton Beam Writing (PBW) for micro chemical devices. The system enable to fabricate the various kind of shape in XY stage, increase the productivity and meet the requirement of fabricate in the centimeter ranger. The flexible system transforms licensed 3D CAD (Computer Aided Design) data to pattern data that is used to control the XY stage of the PBW system. The experimental results showed a brightly future of proton beam in micro fabrication.
UR - http://www.scopus.com/inward/record.url?scp=78751524411&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78751524411&partnerID=8YFLogxK
U2 - 10.1109/MHS.2010.5669508
DO - 10.1109/MHS.2010.5669508
M3 - Conference contribution
AN - SCOPUS:78751524411
SN - 9781424479962
T3 - 2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010
SP - 435
EP - 440
BT - 2010 International Symposium on Micro-NanoMechatronics and Human Science
T2 - 21st Annual Symposium on Micro-Nano Mechatronics and Human Science, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010
Y2 - 7 November 2010 through 10 November 2010
ER -