Quartz crystal microbalance odor sensor coated with mixed-thiol-compound sensing film

Atsushi Saitoh, Tooru Nomura, Severino Munoz, Toyosaka Moriizumi

研究成果: Conference article査読

3 被引用数 (Scopus)

抄録

A study was conducted to investigate the effect of the sensing film structure for the sensor response and to develop a new deposition method for composing a sensing film with a desired response property. The structure of thiol compounds were observed by atomic force microscopy (AFM) or scanning Maxwell stress microscope (SMM) in order to verify the relation between the film structure and the feature of the sensor response. Results emphasize the importance of both the sensing film structure and the atomic group on the sensing film surface to high selectivity. Furthermore, a method was developed for creating a sensing film with a specific selectivity.

本文言語English
ページ(範囲)685-690
ページ数6
ジャーナルProceedings of the Annual IEEE International Frequency Control Symposium
出版ステータスPublished - 1998 12月 1
イベントProceedings of the 1998 IEEE International Frequency Control Symposium - Pasadena, CA, USA
継続期間: 1998 5月 271998 5月 29

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 電子工学および電気工学

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