Recent Progress in Graphene Processes for Metallization and RF Applications

Kazuyoshi Ueno

doi:10.1109/IITC52079.2022.9881312

Recent Progress in Graphene Processes for Metallization and RF Applications

研究成果: Conference contribution

抄録

Research on graphene processes for the applications to interconnects and electrodes, such as graphene caps, direct deposition of multi-layer graphene, and stable intercalation doping, is steadily progressing. Furthermore, attention will be paid to the application of graphene, which has a high kinetic inductance, to RF devices. Here, I will give an overview of recent research trends toward the practical application of graphene and discuss the issues.

本文言語	English
ホスト出版物のタイトル	2022 IEEE International Interconnect Technology Conference, IITC 2022
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	37-39
ページ数	3
ISBN（電子版）	9781665486460
DOI	https://doi.org/10.1109/IITC52079.2022.9881312
出版ステータス	Published - 2022
イベント	2022 IEEE International Interconnect Technology Conference, IITC 2022 - San Jose, United States 継続期間: 2022 6月 27 → 2022 6月 30

出版物シリーズ

名前	2022 IEEE International Interconnect Technology Conference, IITC 2022

Conference

Conference	2022 IEEE International Interconnect Technology Conference, IITC 2022
国/地域	United States
City	San Jose
Period	22/6/27 → 22/6/30

ASJC Scopus subject areas

ハードウェアとアーキテクチャ
電子工学および電気工学
安全性、リスク、信頼性、品質管理
電子材料、光学材料、および磁性材料

文献へのアクセス

10.1109/IITC52079.2022.9881312

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引用スタイル

Ueno, K 2022, Recent Progress in Graphene Processes for Metallization and RF Applications. in 2022 IEEE International Interconnect Technology Conference, IITC 2022. 2022 IEEE International Interconnect Technology Conference, IITC 2022, Institute of Electrical and Electronics Engineers Inc., pp. 37-39, 2022 IEEE International Interconnect Technology Conference, IITC 2022, San Jose, United States, 22/6/27. https://doi.org/10.1109/IITC52079.2022.9881312

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title = "Recent Progress in Graphene Processes for Metallization and RF Applications",

abstract = "Research on graphene processes for the applications to interconnects and electrodes, such as graphene caps, direct deposition of multi-layer graphene, and stable intercalation doping, is steadily progressing. Furthermore, attention will be paid to the application of graphene, which has a high kinetic inductance, to RF devices. Here, I will give an overview of recent research trends toward the practical application of graphene and discuss the issues.",

keywords = "cap, CVD, graphene, inductor, intercalation doping, interconnect, kinetic inductance, solid-phase deposition",

author = "Kazuyoshi Ueno",

note = "Funding Information: This work was supported by JST CREST Grant No. JPMJCR1532, NEDO LEAP, JSPS KAKENHI 26420319, 18K94289. I would like to thank all those who cooperated in the research introduced here. Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE International Interconnect Technology Conference, IITC 2022 ; Conference date: 27-06-2022 Through 30-06-2022",

year = "2022",

doi = "10.1109/IITC52079.2022.9881312",

language = "English",

series = "2022 IEEE International Interconnect Technology Conference, IITC 2022",

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N1 - Funding Information: This work was supported by JST CREST Grant No. JPMJCR1532, NEDO LEAP, JSPS KAKENHI 26420319, 18K94289. I would like to thank all those who cooperated in the research introduced here. Publisher Copyright: © 2022 IEEE.

PY - 2022

Y1 - 2022

N2 - Research on graphene processes for the applications to interconnects and electrodes, such as graphene caps, direct deposition of multi-layer graphene, and stable intercalation doping, is steadily progressing. Furthermore, attention will be paid to the application of graphene, which has a high kinetic inductance, to RF devices. Here, I will give an overview of recent research trends toward the practical application of graphene and discuss the issues.

AB - Research on graphene processes for the applications to interconnects and electrodes, such as graphene caps, direct deposition of multi-layer graphene, and stable intercalation doping, is steadily progressing. Furthermore, attention will be paid to the application of graphene, which has a high kinetic inductance, to RF devices. Here, I will give an overview of recent research trends toward the practical application of graphene and discuss the issues.

KW - cap

KW - CVD

KW - graphene

KW - inductor

KW - intercalation doping

KW - interconnect

KW - kinetic inductance

KW - solid-phase deposition

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BT - 2022 IEEE International Interconnect Technology Conference, IITC 2022

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Y2 - 27 June 2022 through 30 June 2022

ER -

Recent Progress in Graphene Processes for Metallization and RF Applications

抄録

出版物シリーズ

Conference

ASJC Scopus subject areas

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