Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere

Toshiya Wantanabe; Tetuo Kitabayashi; Chiaki Nakayama

Resistivity and microstructure of alumina ceramics added with TiO₂ fired in reducing atmosphere

Toshiya Wantanabe, Tetuo Kitabayashi, Chiaki Nakayama

共通

研究成果: Article › 査読

2 被引用数 (Scopus)

抄録

In this study, the relationship between electrical resistance and microstructures of TiO₂-containing Al₂O₃ is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.

本文言語	English
ページ（範囲）	1076-1083
ページ数	8
ジャーナル	Journal of the Ceramic Society of Japan. International ed.
巻	101
号	10
出版ステータス	Published - 1993 10月 1

ASJC Scopus subject areas

工学（全般）

他のファイルとリンク

引用スタイル

@article{d2df1a36f1724db99e325f15e86cfd2e,

title = "Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere",

abstract = "In this study, the relationship between electrical resistance and microstructures of TiO2-containing Al2O3 is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.",

author = "Toshiya Wantanabe and Tetuo Kitabayashi and Chiaki Nakayama",

year = "1993",

month = oct,

day = "1",

language = "English",

volume = "101",

pages = "1076--1083",

journal = "Journal of the Ceramic Society of Japan. International ed.",

issn = "0912-9200",

number = "10",

}

TY - JOUR

T1 - Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere

AU - Wantanabe, Toshiya

AU - Kitabayashi, Tetuo

AU - Nakayama, Chiaki

PY - 1993/10/1

Y1 - 1993/10/1

N2 - In this study, the relationship between electrical resistance and microstructures of TiO2-containing Al2O3 is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.

AB - In this study, the relationship between electrical resistance and microstructures of TiO2-containing Al2O3 is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.

UR - http://www.scopus.com/inward/record.url?scp=0027682358&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027682358&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0027682358

SN - 0912-9200

VL - 101

SP - 1076

EP - 1083

JO - Journal of the Ceramic Society of Japan. International ed.

JF - Journal of the Ceramic Society of Japan. International ed.

IS - 10

ER -

Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere

抄録

ASJC Scopus subject areas

他のファイルとリンク

フィンガープリント

引用スタイル

Resistivity and microstructure of alumina ceramics added with TiO₂ fired in reducing atmosphere