Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling

K. Mitsuishi; M. Shimojo; M. Tanaka; M. Takeguchi; K. Furuya

doi:10.1109/imnc.2004.245752

Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling

K. Mitsuishi, M. Shimojo, M. Tanaka, M. Takeguchi, K. Furuya

研究成果: Conference contribution

本文言語	English
ホスト出版物のタイトル	Digest of Papers - Microprocesses and Nanotechnology 2004
出版社	The Japan Society of Applied Physics
ページ	118-119
ページ数	2
ISBN（印刷版）	4990247205, 9784990247201
DOI	https://doi.org/10.1109/imnc.2004.245752
出版ステータス	Published - 2004
外部発表	はい
イベント	2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan 継続期間: 2004 10月 26 → 2004 10月 29

出版物シリーズ

名前	Digest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference	2004 International Microprocesses and Nanotechnology Conference
国/地域	Japan
City	Osaka
Period	04/10/26 → 04/10/29

ASJC Scopus subject areas

工学（全般）

文献へのアクセス

10.1109/imnc.2004.245752

他のファイルとリンク

引用スタイル

Mitsuishi, K., Shimojo, M., Tanaka, M., Takeguchi, M., & Furuya, K. (2004). Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 118-119). Article 28P-6-17 (Digest of Papers - Microprocesses and Nanotechnology 2004). The Japan Society of Applied Physics. https://doi.org/10.1109/imnc.2004.245752

Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling. / Mitsuishi, K.; Shimojo, M.; Tanaka, M. その他.
Digest of Papers - Microprocesses and Nanotechnology 2004. The Japan Society of Applied Physics, 2004. p. 118-119 28P-6-17 (Digest of Papers - Microprocesses and Nanotechnology 2004).

研究成果: Conference contribution

Mitsuishi, K, Shimojo, M, Tanaka, M, Takeguchi, M & Furuya, K 2004, Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling. in Digest of Papers - Microprocesses and Nanotechnology 2004., 28P-6-17, Digest of Papers - Microprocesses and Nanotechnology 2004, The Japan Society of Applied Physics, pp. 118-119, 2004 International Microprocesses and Nanotechnology Conference, Osaka, Japan, 04/10/26. https://doi.org/10.1109/imnc.2004.245752

Mitsuishi K, Shimojo M, Tanaka M, Takeguchi M, Furuya K. Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling. In Digest of Papers - Microprocesses and Nanotechnology 2004. The Japan Society of Applied Physics. 2004. p. 118-119. 28P-6-17. (Digest of Papers - Microprocesses and Nanotechnology 2004). doi: 10.1109/imnc.2004.245752

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