Review of development and performance evaluation of active-matrix nanocrystalline Si electron emitter array for massively parallel electron beam direct-write lithography

Naokatsu Ikegami, Akira Kojima, Hiroshi Miyaguchi, Takashi Yoshida, Shinya Yoshida, Masanori Muroyama, Masanori Sugata, Nobuyoshi Koshida, Kentaro Totsu, Masayoshi Esashi

研究成果: Review article › 査読

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Engineering & Materials Science