TY - CONF
T1 - Selective drive of electrostatic actuators using remote inductive powering
AU - Takeuchi, S.
AU - Futai, N.
AU - Shimoyama, I.
N1 - Funding Information:
Photolithography masks were fabricated using EB lithography apparatus of VLSI Design and Education Center (VDEC), the University of Tokyo. Shoji Takeuchi received the Research Fellowships of the Japan Society for the Promotion of Science (JSPS) for Young Scientists in 2000. Shoji Takeuchi was born in Japan in 1972. He received the BE, ME and PhD degrees in mechanical engineering from the University of Tokyo in 1995, 1997 and 2000, respectively. He is currently a Lucturer of the Institute of Industrial Science, The University of Tokyo, Japan. Isao Shimoyama was born in Japan in 1955. He received the BE, ME, and PhD degrees in mechanical engineering from the University of Tokyo in 1977, 1979, and 1982, respectively. He joined the University of Tokyo in 1982 and is currently a Professor in the Department of Mechano-Informatics, The University of Tokyo. His research interest is in micro robotics.
PY - 2001
Y1 - 2001
N2 - A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.
AB - A remote inductive powering system for driving electrostatic actuators is proposed. The actuators can be controlled selectively by matching transmitter's frequency to the resonance frequency of the receiver LC-circuits. A 8.5 mm × 7.2 mm square and 20 turns planar coil are used as a receiver coil. The maximum output voltage of the receiver was measured about 45 V when a load resistance is more than 100 kΩ. A conventional electrostatic comb actuator was used for a prototype of the remote powering system. The coil and the actuator were fabricated on the same surface of a commercially available silicon on insulator (SOI) wafer. The displacement of the actuators were selectively controlled by changing the transmitter's frequency.
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M3 - Paper
AN - SCOPUS:0035010316
SP - 574
EP - 577
T2 - 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001)
Y2 - 21 January 2001 through 25 January 2001
ER -