Silicon-based honeycomb photonic crystal structures with complete photonic band gap at 1.5 μm wavelength

Jia Yu Ye; Shigeki Matsuo; Vygantas Mizeikis; Hiroaki Misawa

doi:10.1063/1.1815045

Silicon-based honeycomb photonic crystal structures with complete photonic band gap at 1.5 μm wavelength

Jia Yu Ye, Shigeki Matsuo, Vygantas Mizeikis, Hiroaki Misawa

研究成果: Article › 査読

17 被引用数 (Scopus)

抄録

Photonic crystal structures consisting of dielectric cylinders arranged in a honeycomb pattern were fabricated in silicon using electron-beam lithography and inductively-coupled plasma dry-etching. Lattice parameters of the fabricated structures (rod diameter ∼0.4 μm, distance between the centers of neighboring rods ∼0.85 μm, and rod height ∼5.2 μm) allowed to achieve and confirm experimentally the complete photonic band gap in vicinity of the optical communications wavelengths around 1.5 μm.

本文言語	English
ページ（範囲）	6934-6936
ページ数	3
ジャーナル	Journal of Applied Physics
巻	96
号	11
DOI	https://doi.org/10.1063/1.1815045
出版ステータス	Published - 2004 12月 1
外部発表	はい

ASJC Scopus subject areas

物理学および天文学（全般）

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10.1063/1.1815045

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title = "Silicon-based honeycomb photonic crystal structures with complete photonic band gap at 1.5 μm wavelength",

abstract = "Photonic crystal structures consisting of dielectric cylinders arranged in a honeycomb pattern were fabricated in silicon using electron-beam lithography and inductively-coupled plasma dry-etching. Lattice parameters of the fabricated structures (rod diameter ∼0.4 μm, distance between the centers of neighboring rods ∼0.85 μm, and rod height ∼5.2 μm) allowed to achieve and confirm experimentally the complete photonic band gap in vicinity of the optical communications wavelengths around 1.5 μm.",

author = "Ye, {Jia Yu} and Shigeki Matsuo and Vygantas Mizeikis and Hiroaki Misawa",

note = "Funding Information: This work was in part supported by the Asian Office of Air Force Research and Development Contract No. F62562-03-P-0208AOARD 02-35.",

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AU - Ye, Jia Yu

AU - Matsuo, Shigeki

AU - Mizeikis, Vygantas

AU - Misawa, Hiroaki

N1 - Funding Information: This work was in part supported by the Asian Office of Air Force Research and Development Contract No. F62562-03-P-0208AOARD 02-35.

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Y1 - 2004/12/1

N2 - Photonic crystal structures consisting of dielectric cylinders arranged in a honeycomb pattern were fabricated in silicon using electron-beam lithography and inductively-coupled plasma dry-etching. Lattice parameters of the fabricated structures (rod diameter ∼0.4 μm, distance between the centers of neighboring rods ∼0.85 μm, and rod height ∼5.2 μm) allowed to achieve and confirm experimentally the complete photonic band gap in vicinity of the optical communications wavelengths around 1.5 μm.

AB - Photonic crystal structures consisting of dielectric cylinders arranged in a honeycomb pattern were fabricated in silicon using electron-beam lithography and inductively-coupled plasma dry-etching. Lattice parameters of the fabricated structures (rod diameter ∼0.4 μm, distance between the centers of neighboring rods ∼0.85 μm, and rod height ∼5.2 μm) allowed to achieve and confirm experimentally the complete photonic band gap in vicinity of the optical communications wavelengths around 1.5 μm.

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Silicon-based honeycomb photonic crystal structures with complete photonic band gap at 1.5 μm wavelength

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