Silicon surface processing techniques for micro-systems fabrication

Engineering & Materials Science

• Silicon 61%
• Photonic crystals 61%
• Electron beam lithography 60%
• Fabrication 58%
• Dry etching 57%
• Reactive ion etching 53%
• Microfabrication 49%
• Photonic band gap 33%
• Ultrashort pulses 31%
• Crystal lattices 30%
• Lasers 29%
• Laser ablation 28%
• Crystal structure 25%
• Light transmission 25%
• Optical properties 24%
• Micromachining 24%
• Structural properties 21%
• Debris 21%
• Masks 18%
• Thin films 18%
• Aspect ratio 18%
• Wavelength 17%
• Drilling 16%
• Air 10%

Physics & Astronomy

• fabrication 47%
• silicon 42%
• photonics 40%
• lithography 32%
• etching 29%
• electron beams 28%
• scoring 26%
• lasers 25%
• drilling 22%
• micromachining 22%
• data transmission 21%
• debris 21%
• laser ablation 18%
• shot 18%
• ions 18%
• aspect ratio 17%
• masks 16%
• projection 15%
• crystal structure 15%
• wafers 14%
• optical properties 12%
• air 11%
• thin films 10%
• pulses 9%
• crystals 9%
• wavelengths 9%

Chemical Compounds

• Photonic Crystal 100%
• Electron Beam 85%
• Micromachining 54%
• Optical Transmission 53%
• Laser Ablation 43%
• Ion 31%
• Band Gap 29%
• Optical Property 28%
• Wavelength 27%
• Surface 25%
• Pressure 22%
• Crystal Structure 19%